Adhesion Promoter for Bare Quartz Wafer

[Mike P]

Hi. I was wondering if anyone knows of an adhesion promoter for bare
quartz wafers to help with the adhesion of positive photoresists
(specifically AZ1518). Any help would be greatly appreciated.

Thanks,

Mike P

[boer]

Post by Mike P
Hi. I was wondering if anyone knows of an adhesion promoter for bare
quartz wafers to help with the adhesion of positive photoresists
(specifically AZ1518). Any help would be greatly appreciated.
Thanks,
Mike P

Hexamythldisilazane(HMDS)or equivalent. Silanizing the surface after a
hot plate bake >100C or an Inductive oxygen plasma to clean/activate the
surface.

boer