950k PMMA in dichloromethane?

[Manuel]

Hi folks,
I want to spin coat a substrate with 950k PMMA. My problem is that I
can bake to no more than 100ºC and this is the reason I can't use the
commercial PMMA diluted in chlorobenzene or anysol. I have found that
dichloromethane is a good solvent for PMMA and with a low boiling
point (40C).
The question is if this solvent, the dichloromethane, will cut the
chains of the PMMA giving a lower MW PMMA (unwanted) or if it will
keep the original lenght of the PMMA?

Thank you very much in advance.

Manuscha

[Ernie]

Post by Manuel
Hi folks,
I want to spin coat a substrate with 950k PMMA. My problem is that I
can bake to no more than 100ºC and this is the reason I can't use the
commercial PMMA diluted in chlorobenzene or anysol. I have found that
dichloromethane is a good solvent for PMMA and with a low boiling
point (40C).
The question is if this solvent, the dichloromethane, will cut the
chains of the PMMA giving a lower MW PMMA (unwanted) or if it will
keep the original lenght of the PMMA?
Thank you very much in advance.
Manuscha

Dichloromethane will not cut the PMMA chain, and even if there will be a
small amount of HCl generated by the decomposition of dichloromethane, the
HCl will not cleave the PMMA chain. But, will the HCl attack your substrate
or do other damage?

Regards,

Ernie

[Manuel]

Ernie, thanks a lot for your reply.
Dichloromethane is extendely used as PMMA remover after e-beam
lithography process. So I guess if any HCl present due to the
decomposition of dichloromethane won't damage the substrate. What do
you think?
Manuscha

Post by Ernie
Dichloromethane will not cut the PMMA chain, and even if there will be a
small amount of HCl generated by the decomposition of dichloromethane, the
HCl will not cleave the PMMA chain. But, will the HCl attack your substrate
or do other damage?
Regards,
Ernie